JPH0217831U - - Google Patents

Info

Publication number
JPH0217831U
JPH0217831U JP9595688U JP9595688U JPH0217831U JP H0217831 U JPH0217831 U JP H0217831U JP 9595688 U JP9595688 U JP 9595688U JP 9595688 U JP9595688 U JP 9595688U JP H0217831 U JPH0217831 U JP H0217831U
Authority
JP
Japan
Prior art keywords
electrodes
plasma processing
frequency power
plasma
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9595688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9595688U priority Critical patent/JPH0217831U/ja
Publication of JPH0217831U publication Critical patent/JPH0217831U/ja
Pending legal-status Critical Current

Links

JP9595688U 1988-07-20 1988-07-20 Pending JPH0217831U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9595688U JPH0217831U (en]) 1988-07-20 1988-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9595688U JPH0217831U (en]) 1988-07-20 1988-07-20

Publications (1)

Publication Number Publication Date
JPH0217831U true JPH0217831U (en]) 1990-02-06

Family

ID=31320737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9595688U Pending JPH0217831U (en]) 1988-07-20 1988-07-20

Country Status (1)

Country Link
JP (1) JPH0217831U (en])

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